Group Presentation July 2018 to June 2025


    Biomedical / Outreach (2025)

  1. Jacobs Medical Center-UCSD Health, A Day in the Life of a Cancer Researcher (invited Talk), Jaimin R. Shah, La Jolla, CA - July 2, 2025


  2. Colleges Against Cancer at UCSD-Cancer Conversations, Oncolytic Viral Vectors: A Dual Mechanism for Tumor Destruction and Immune System Activation (invited Talk), Jaimin R. Shah, La Jolla, CA - May 13, 2025


  3. Frontiers in Drug Delivery Systems and Biopharmaceutics, Parul University, Oncolytic Viral Vectors: A Dual Mechanism for Tumor Destruction and Immune System Activation (invited Talk), Jaimin R. Shah, India - January 24-25, 2025


  4. PharmSci 360-American Association of Pharmaceutical Scientists (AAPS), Pandemic Preparedness and Role of Novel Drug Delivery Technology (Talk), Jaimin R. Shah, Salt Lake City, UT - October 2023, 2024


    5. IEEE SISC San Diego, California (2025)

  5. Talk: Thermal Boundary Conductance of Ultrathin Aluminum Nitride Interfaces for Advanced Packaging, Diego Contreras Mora, Ping-Che Lee, Mingeun Choi, Dohyun Go, SeongUk Yun, Mansour Moinpour, Larry Chen, Mark Clark, Ravindra Kanjolia, Satish Kumar, Andrew C. Kummel, San Diego, CA - December 2025


  6. Air-stable Low Dielectric Constant SiOx/AlOx Nanolaminate Films Deposited by Thermal Pulsed Chemical Vapor Deposition with Carbon Doping for Interlayer Dielectric, Jing Mu, Xinyu Wang, Kesong Wang, Jit Dutta, Dipayan Pal, Matthew Breeden, Keith T. Wong, Ajay Yadav, Srinivas D. Nemani, Ellie Yieh, Andrew C. Kummel, San Diego, CA - December 2025


  7. Conformal Deposition of Low-k SiAlOx Nanolaminates via Alternating ALD and Surface-Catalyzed Growth, Xinyu Wang, Jing Mu, Jit Dutta, Dipayan Pal, Keith Wong, Srinivas Nemani, Ellie Yieh, Andrew C. Kummel, San Diego, CA - December 2025


  8. Poster: Hybrid of Sputter AlN and Aerosol Deposition AlN for 100 μm Height Chiplet Encapsulation, Dohyun Go, Victor Ashita, Muhannad S. Bakir, Andrew C. Kummel, San Diego, CA - December 2025


  9. Poster: N-polar AlScN Thin Films without Abnormally Oriented Grains Using High Ion Energy Sputter Process, SeongUk Yun, Dohyun Go, Ping-Che Lee, Andrew C. Kummel, San Diego, CA - December 2025


  10. Poster: Nanoscale Characterization of DDO Cleaned Cu Surfaces for Hybrid Interconnects, Jit Dutta, Cheng-Hsuan Kuo, Dipayan Pal, Ping-Che Lee, Diego Contreras Mora, Hyeokin Ko, C. V. Thomson, Andrew C. Kummel, San Diego, CA - December 2025


  11. Poster: Vapor-deposited MOF chiplet underfill to scale gap below 1 micron for inverse hybrid bonding, Dipayan Pal, Madison Manley, Jit Dutta, Ashita Victor, Muhannad S. Bakir, Andrew C. Kummel, San Diego, CA - December 2025


  12. Poster: N2 Plasma Passivation of In-Situ Vapor Cleaned Cu for Advanced Packaging, Hyeokin Ko, Jit Dutta, Cheng-Hsuan Kuo, Iou-Sheng Ke, Mohamed Shaheen, Andrew C. Kummel, San Diego, CA - December 2025


  13. Impact of ALD TiN Precursors on Hafnium Oxide Leakage and Suppression by Forming Gas Anneal, Amy E. Ross, Xinyu Wang, Shreyam Natani, Jit Dutta, Diego Contreras Mora, Adrian Alvarez, Walter Hernandez, Andrew C. Kummel, San Diego, CA - December 2025


    14. ALD/ALE Jeju Island, South Korea (2025)

  14. Talk: Rapid Test for ALD in High Aspect Ratio Spaces Utilizing Thermally Bonded Chips and Hydrazine with Titanium Tetrachloride for TiN Deposition., Amy E Ross, Dipayan Pal, Dohyun Go, Diego Contreras Mora, Ping Che Lee, Danish Baig, Walter Hernandez, Muhannad S Bakir, Jefferey Spiegelman, Andrew C. Kummel, Korea - 2025


    15. GOMACTech (2025)

  15. Poster: Vapor-deposited MOF chiplet underfill to scale gap below 1 micron for inverse hybrid bonding (IHB), Dipayan Pal, Madison Manley, Jit Dutta, Ashita Victor, Muhannad S. Bakir, Andrew C. Kummel, Penn State, PA - 2025


  16. Poster: Effective Removal of Environmental Damage on Cu Pads by DDO for Hybrid Integration, Jit Dutta, Cheng-Hsuan Kuo, Andrew C. Kummel, Penn State, PA - 2025


    17. CHIMES Annual Meeting (SRC) Penn State, USA (2025)

  17. Talk: Enhancing AlN Crystallographic Properties and Thermal Conductivity using HiPIMS + Kick deposition, Diego Contreras Mora, Ping-Che Lee, Aaron J. McLeod, Mingeun Choi, Satish Kumar, Andrew C. Kummel, Charleston, SC - March 2025


  18. Poster: Low-pressure HiPIMS + Kick deposition with ultra-high growth rate, Diego Contreras Mora, Ping-Che Lee, Dohyun Go, SeongUk Yun, Mingeun Choi, Satish Kumar, Andrew C. Kummel, Pasadena, CA - March 2025


    19. IEEE IITC Busan, South Korea (2025)

  19. Poster: Integration of Sputter AlN and Aerosol Deposition AlN for 100 μm Height Chiplet Encapsulation, Dohyun Go, Victor Ashita, Hyunseok Song, Jungho Ryu, Muhannad S. Bakir, Andrew C. Kummel, Busan, South Korea - June 2025


  20. Talk (presented by Prof. A. C. Kummel): Nanoscale Assessment of Capping Layers to Prevent Surface Oxidation of W Interconnect Plugs, Jit Dutta, Ping-Che Lee, Dipayan Pal, Wei Zhang, Nathan Jarnagin, Larissa Juschkin, Evgeniia Butaeva, Roel Gronheid, Andrew C. Kummel, Busan, South Korea - June 2025


  21. Poster: Influence of Ion Energy on the Surface Polarity of AlScN Thin Films during Sputter Process, SeongUk Yun, Dohyun Go, Ping-Che Lee, Andrew C. Kummel, Busan, South Korea - June 2025


  22. Novel Low-Temperature Atomic Layer Annealing of Vertically Aligned Hexagonal Boron Nitride, Ping-Che Lee, Diego Contreras Mora, SeongUk Yun, Dipayan Pal, Amy Ross, Mark Clark, Larry Chen, Ravindra Kanjolia, Mansour Moinpour, Andrew C. Kummel, Busan, South Korea - June 2025


  23. Poster: Deposition of Pinhole and Particle Free Subnanometer TiN Films in High Aspect Ratio Spaces, Amy E Ross, Dipayan Pal, Dohyun Go, Diego Contreras Mora, Ping Che Lee, Danish Baig, Walter Hernandez, Muhannad S Bakir, Jefferey Spiegelman, Andrew C. Kummel, Busan, South Korea - June 2025


    24. ALD/ALE Conference Helsinki, Finland (2024)

  24. Poster: A Low-Pressure HiPIMS + Kick AlN deposition with 60 nm/min deposition rate, Diego Contreras Mora, Ping-Che Lee, Mingeun Choi, Satish Kumar, Andrew C. Kummel, Atlanta, GA - 2024


  25. Talk: Enhanced corrosion resistance in Aluminum-based electrolyzer components via stoichiometry-tuned Atomic Layer Deposited TiOx Films, Kesong Wang, Adam Paxson, Thomas I. Valdez, Ahmet Gün Erlat, Prabhakar R. Bandaru, Andrew C. Kummel, Albany, NY - July 2024


  26. Talk: Controlled Surface Polarity and Crystallinity of Gallium Nitride on Si (111) Using Atomic Layer Deposition for Selective Wet-Etch and STEM Analysis, SeongUk Yun, Kesong Wang, Andrew C. Kummel, Honolulu, HI - October 2024


  27. Talk: Improved Crystallinity and Polarity Determination of Gallium Nitride on Si (111) Using Atomic Layer Annealing, SeongUk Yun, Ping-Che Lee, Jeffrey J. Spiegelman, Andrew C. Kummel, Helsinki, Finland - August 2024


    28. IEEE SISC San Diego, California (2024)

  28. Low Dielectric Constant SiOx/AlOx Nanolaminate Film via Tuning the Si-to-Al Ratio, Xinyu Wang, Jing Mu, James Huang, Yunil Cho, Kesong Wang, Dipayan Pal, Ajay Yadav, Keith Wong, Ellie Yieh, Srinivas Nemani, Andrew C. Kummel; UC San Diego and Applied Materials, San Diego, CA - December 11-14, 2024


  29. Poster: High Quality AlN through Low-Pressure High-Power Impulse Magnetron Sputtering, Diego Contreras Mora, Ping-Che Lee, Dohyun Go, SeongUk Yun, Mingeun Choi, Satish Kumar, Andrew C. Kummel, San Diego, CA - December 2024


  30. Poster: A Study on Electron Back-Scattered Diffraction Patterns for Inline Copper Treatment in Interconnect Fabrication, Jit Dutta, Cheng-Hsuan Kuo, S. T. Ko, J. Luo, Andrew C. Kummel, San Diego, CA - December 2024


  31. Poster: A Fast Process for Vapor-deposited ZIF-8 MOF as low-k dielectrics and plasma etch selective seamless high aspect ratio and multiple aspect ratio gap fill, Dipayan Pal, Naeun Yang, Andrew C. Kummel, San Diego, CA - December 2024


  32. Poster: Property Modulation of Aerosol Deposition AlN Using Multi-shot Laser Annealing for Gap Filling of Trench with Tens of μm Height, Dohyun Go, Colin Meisner, Victor Ashita, Javier Garay, Muhannad S. Bakir, Andrew C. Kummel, San Diego, CA - December 2024


  33. Talk: Identification of defects on monolayer MoS2 through infrared photo-induced force microscopy, Shreyam Natani, Sung Park, Andrew C. Kummel, Prabhakar Bandaru, San Diego, CA - December 2024


  34. Poster: Saturation Dose Analysis of TiN Utilizing Titanium Tetrachloride and Hydrazine, Amy Ross, Ping Che Lee, Jannick Fammels, Diego Contreras Mora, Jefferey Speigelman, Andrew C. Kummel, San Diego, CA - December 2024


    35. GOMACTech (2024)

  35. Optimal Precursor Dosing Condition for ALD Deposited TiN with Titanium Tetrachloride and Hydrazine, Amy Ross, Ping Che Lee, Jannick Fammels, Diego Contreras Mora, Jefferey Speigelman, Andrew C. Kummel, Pasadena, CA - 2024


  36. Low pressure HiPIMS+Kick AlN Deposition with ultra high growth rate, Diego Contreras Mora, Dohyun Go, Seonguk Yun, Satish Kumar, Andrew C. Kummel, Pasadena, CA - 2024


    37. VLSI Technology Symposium Taipei, Taiwan (2024)

  37. High-Thermal-Conductivity, High-Speed Deposition of AlN by Bipolar High-Power Impulse Magnetron Sputtering, Ping-Che Lee, Aaron J. McLeod, Mingeun Choi, Diego Vaca, Diego Contreras Mora, Satish Kumar, Andrew C. Kummel, Taipei, Taiwan - 2024


    38. International Interconnect Technology Conference (2024)

  38. Investigation of the Low Dielectric Constant Properties of SiOx/AlOx Nanolaminate Film, Xinyu Wang, Jing Mu, James Huang, Yunil Cho, Kesong Wang, Dipayan Pal, Ajay Yadav, Keith Wong, Ellie Yieh, Srinivas Nemani, Andrew C. Kummel, San Jose, CA - June 2024


  39. Talk: A Rapid Process for Vapor-deposited MOF as low-k dielectrics seamless gap fill for M1 and M2 Interconnects, Dipayan Pal, Naeun Yang, Harsono Simka, Andrew C. Kummel, San Jose, CA - June 2024


    40. VLSI IITC San Jose, California (2024)

  40. Thermal Conductivity Study of One-Micron AlN Deposited by Bipolar HiPIMS, Ping-Che Lee, Aaron J. McLeod, Mingeun Choi, Diego Vaca, Satish Kumar, Andrew C. Kummel, San Jose, CA - June 2024


    41. ASD Canada (2024)

  41. Deposition on SiO2 in Preference to W by Water-free Chemical Vapor Depositions with Aniline Passivation, J. Mu, J. Huang, Y. Cho, A. Yadav, K. Wong, S. Nemani, E. Yieh, Andrew C. Kummel; Low-k SiOx/AlOx, Canada - 2024


    42. Global Insight Conference on Breast Cancer (2023)

  42. Encapsulated Oncolytic Adenovirus for the Treatment of Breast Cancer (invited keynote), Jaimin R. Shah, San Diego, CA - November 6-7, 2023


    43. IEEE SISC San Diego, California (2023)

  43. . Al2O₃ Deposition on SiO2 in Preference to W by Water-free Chemical Vapor Depositions with Aniline Passivation, J. Mu, J. Huang, Y. Cho, A. K. Yadav, K. Wong, S. Nemani, E. Yieh, Andrew C. Kummel; UC San Diego, Applied Materials, San Diego, CA - 2023


  44. Poster: Vapor-Deposited ZIF-8 Films as Ultra-Low-k Dielectrics for Seamless Gap Fill, Dipayan Pal, Jacob Watson, Harsono Simka, Andrew C. Kummel, San Diego, CA - December 2023


  45. Poster: Oxygen-Vacancy-Rich TiO2 for Corrosion Inhibition via ALD, Kesong Wang, SeongUk Yun, Adam Paxson, Thomas I. Valdez, Andrew C. Kummel, Prabhakar R. Bandaru, San Diego, CA - December 2023


  46. Poster: Control Crystallinity and Polarity of GaN on Oxide-Free Si (111) Using ALD, SeongUk Yun, Ping-Che Lee, Aaron J. McLeod, Harshil Kashyap, Jeffrey J. Spiegelman, Andrew C. Kummel, San Diego, CA - December 2023


  47. Achieving High-Thermal-Conductivity One-Micron AlN Deposition by HiPIMS Plus Kick, Ping-Che Lee, Diego Contreras Mora, Mingeun Choi, SeongUk Yun, Dipayan Pal, Amy Ross, Mark Clark, Larry Chen, Ravindra Kanjolia, Mansour Moinpour, Satish Kumar, Andrew C. Kummel, San Diego, CA - December 2023


    48. American Chemical Society (2023)

  48. Overcoming Adenovirus Delivery Challenges in CAR-Deficient Cancer Tumors with DOTAP-Folate Liposomes Conjugated to Human Serum Albumin (poster), Jaimin R. Shah, San Francisco, CA - August 13-17, 2023


    49. April Krueger Women's Health Symposium (2023)

  49. Overcoming Adenovirus Delivery Challenges in CAR-Deficient Cancer Tumors with DOTAP-Folate Liposomes Conjugated to Human Serum Albumin (poster), Jaimin R. Shah, La Jolla, CA - May 14-16, 2023


    50. Solid Tumor Therapeutics Annual Retreat (2023)

  50. Development of Adenovirus Containing Liposomes Produced by Extrusion vs. Homogenization: A Comparison for Scale-Up Purposes (poster), Jaimin R. Shah, La Jolla, CA - March 3, 2023


    51. ALD/ALE Conference Seattle, Washington (2023)

  51. Poster: Low-Temperature Atomic Layer Annealing Deposition of Crystallized Gallium Nitride on Oxide-Free Si (111), SeongUk Yun, Ping-Che Lee, Aaron J. McLeod, Janick Fammels, Jacob Watson, Harshil Kashyap, Jeffrey J. Spiegelman, Willi Aigner, Thomas Metzger, Andrew C. Kummel, Seattle, WA - 2023


  52. Crystalline Gallium Nitride Deposition on SiO2 Using RF-Biased Atomic Layer Annealing, Ping-Che Lee, Aaron J. McLeod, Diego Contreras Mora, Kesong Wang, SeongUk Yun, Jit Dutta, Dipayan Pal, Andrew C. Kummel, Seattle, WA - 2023


    53. Academic Surgical Congress (2023)

  53. Oncolytic Adenovirus with Liposome Encapsulation Induces Anticancer Activity in a CAR-Deficient Tumor Model (Talk), Nicole Goldhaber, Houston, TX - February 5-7, 2023


    54. IEEE SISC San Diego, California (2022)

  54. . Poster: Optimal Nucleation Method for Plasma Enhanced ALD of Crystallized Gallium Phosphide, SeongUk Yun, Cheng-Hsuan Kuo, Scott T. Ueda, Victor Wang, Harshil Kashyap, Aaron J. McLeod, Zichen Zhang, Ping-Cheng Lee, Andrew C. Kummel, San Diego, CA - December 2022


  55. Poster: Conformal, ultrathin nucleating layers and gate oxides on sp² carbon surfaces for HOPG capacitors and CNT FETs, Zichen Zhang, Greg Pitner, Matthias Passlack, Shreyam Natani, Andrew C. Kummel, Prabhakar Bandaru, San Diego, CA - December 2022


  56. Crystalline Gallium Nitride Deposition by RF-Biased Atomic Layer Annealing, Ping-Che Lee, Aaron J. McLeod, Diego Contreras Mora, Kesong Wang, SeongUk Yun, Jit Dutta, Dipayan Pal, Andrew C. Kummel, San Diego, CA - December 2022


    57. San Antonio Breast Cancer Symposium (2022)

  57. . Treatment of 4T1 Breast Cancer with Liposome-Encapsulated AdAPT-001, a TGF-beta Trap Encoded Oncolytic Adenovirus Currently in a Phase 1/2 Anticancer Trial (poster), Jaimin R. Shah, San Antonio, TX - December 6-10, 2022


    58. La Jolla Immunology Conference (2022)

  58. Development of Adenovirus Containing Liposomes Produced by Extrusion vs. Homogenization: A Comparison for Scale-Up Purposes (poster), Jaimin R. Shah, La Jolla, CA - October 25-27, 2022


    59. Lion's Club (2022)

  59. Oncolytic Virus in Cancer Therapy (invited Talk), Jaimin R. Shah, San Diego, CA - July 23, 2022


    60. IEDM 2020

  60. Sub-0.5 nm Interfacial Dielectric Enables Superior Electrostatics: 65 mV/dec Top-Gated Carbon Nanotube FETs at 15 nm Gate Length, Gregory Pitner, Zichen Zhang*, Qing Lin*, Sheng-Kai Su, Carlo Gilardi*, Chenghsuan Kuo*, Harshil Kashyap*, Theo Weiss*, Zouchangwan Yu*, Tzu-Ang Chao, Lain-Jong Li, Subhasish Mitra*, H.-S. Philip Wong*, Jin Cai, Andrew Kummel*, Prab Bandaru*, Matthias Passlack - 2020


    61. American Vacuum Society National Meeting AVS Oct 21-26, 2018 (Long Beach CA) -4 contributed talks + 1 poster

  61. Aluminum Gettering Gate for Improving Defect Density in SiGe MOSCAP Devices, (poster) Emily Thomson, M. Kavrik, A.C. Kummel, University of California at San Diego

  62. Surface Free Energy and Interfacial Strain in HfO2 and HZO Ferroelectric Formation (talk), Andrew Kummel, E. Chagarov, M. Kavrik, University of California at San Diego; M. Katz, N. Sanford, A. Davydov, National Institute of Standards and Technology (NIST); M. Lee, National Taiwan University

  63. A Dry NF3/NH3 Plasma Clean for Removing Si Native Oxide and Leaving a Smooth Si Surface (talk),, Christopher Ahles, J.Y. Choi, University of California, San Diego; A.C. Kummel, University of California at San Diego

  64. TiNx and TaNx Films via Low-T Thermal ALD using Anhydrous N2H4, (talk), Steven Wolf, M. Breeden, M. Kavrik, University of California at San Diego; D. Alvarez, J. Spiegelman, RASIRC; M. Naik, Applied Materials; A.C. Kummel, University of California at San Diego

  65. TuA12 Investigation of Localized Electronic structures of PbSe Quantum Dot Superlattice on a Highly Oriented Pyrolytic Graphite (HOPG), (talk), Il Jo Kwak, S. Ueda, University of California at San Diego; A. Abelson, C. Qian, M. Law, University of California, Irvine; A.C. Kummel, University of California at San Diego


    66. University of Washington, Pullman -Departmental Seminar, Aug 20, 2018

  66. Subnanometer Engineering of Interfaces in Low Power Electronics-Andrew C Kummel, Mahmut Kavrik, Mike Breeden, Steven Wolf, Jun Hung Park, Evgueni Chagarov, UCSD

    67. Wayne State -Departmental Seminar Sept 6, 2018
  67. Subnanometer Engineering of Interfaces in Low Power Electronics-Andrew C Kummel, Mahmut Kavrik, Mike Breeden, Steven Wolf, Jun Hung Park, Evgueni Chagarov, UCSD

    68. Electrochemical Society Oct 1-4, 2018 (Cancun Mexico) 3 invited talks
  68. Surface Free Energy and Interfacial Strain in HfO2 and HZO Ferroelectric Formation- (invited) E. Chagarov, M. Kavrik (University of California, San Diego) (invited

  69. Low Temperature Thermal ALD TiNx and TaNx Films from Anhydrous N2H4 (invited) -S. Wolf, M. Breeden, M. Kavrik, J. H. Park (University of California, San Diego), D. Alvarez Jr., R. Holmes (RASIRC), J. Spiegelman (Rasirc), and A. C. Kummel (University of California, San Diego)

  70. Engineering Low Defect Density Siox Interfaces on SiGe (invited) -M. Kavrik, E. Thomson (University of California, San Diego), K. Tang (Stanford University), S. T. Ueda (University of California, San Diego), V. Hou, C. Y. Lee, Y. C. Liang (TSMC, Hsinchu, Taiwam), T. Aoki (University of California Irvine), M. Kim (The University of Texas at Dallas), B. Fruhberger (CALIT2, University of San Diego), Y. Taur (University of California, San Diego), P. C. McIntyre (Stanford University), and A. C. Kummel (University of California, San Diego)


    71. Morgan Stanley Investment Conference Oct 29, 2018 (San Diego, CA) Invited Talk
  71. Trends and Science in Immuno-Oncology Andrew Kummel


    72. Semiconductor Interface Specialist Conference, SISC, Dec 5-8 2018 (San Diego, CA) (3 talks + 3 posters)
  72. Hyper-Selective Co Metal ALD on Cu and Pt Without Passivation (Talk), S. Wolf, M. Breeden, S. Ueda, A. C. Kummel, UCSD

  73. Selective Etching of Native Silicon Oxide and Flowable SiO2 in Preference to Silicon, Thermal Silicon Oxide and Silicon Nitride,(talk) C. F. Ahles, J. Y. Cho , R. Hung, N. Ki , S. Nemani, and A. C. Kummel, UCSD, Applied Materials

  74. Self-Assembled Monolayers (SAMs) for Hyperselective Silicide, Metal, and Interconnect Diffusion Barrier (poster), M. Breeden, J. Choi, S. Wolf, C. F. Ahles, and A. C. Kummel, UCSD

  75. Formation of Electronically And Chemically Passive Termination on PbSe Quantum Dot Superlattices, (poster) S. T. Ueda, I. Kwak, S. Wolf, M. Breeden, A. Abelson , C. Qian, M. Law, and A. C. Kummel , UCSD, UC Irvine

  76. Hydrophilic Crystalline Nanoparticles Based Ultrasensitive MRI Contrast Agents (poster), J. Wang, J. Flores, S. L. Blair, W. C. Trogler, and A. C. Kummel, UCSD

  77. Selective surface oxidation with periodic ozone dosing into HfO2 on SiGe for SiOx interface (talk), M. S. Kavrik, V. Hou, E. Rotenberg, A. Bostwick, K. Tang, Y. Taur, P. C. McIntyre, and A. C. Kummel, UCSD, TSMC, Taiwan, Lawrence Berkeley Laboratory, Stanford U


    78. Very Large Scale Integration Conference VLSI-TSA April 22-25 2019 (Hsinchu, Taiwan) 1 contributed talk + 2 posters
  78. Selective Etching of Native Silicon Oxide in Preference to Silicon Oxide and Silicon (poster) C. Ahles, J. Choi, R. Huong, N. Kim, S. Nemani, and A. Kummel

  79. Selective Atomic Layer Deposition of TiO2 (poster) C. Ahles, J. Choi, K. Wong, S. Nemani, and A. Kummel

  80. Hyper-Selective Co Metal ALD on Metals vs. SiO2 without Passivation, (talk) S. Wolf, M. Breeden, S. Ueda and A. Kummel, "


    81. TSMC (Taiwan Semiconductor Manufacturing Comporation) April 26, 2019 (Hsinchu Taiwan) Invited Seminar
  81. Selective ALD for Interconnect Applications A. C. Kummel


    82. Morgan Stanley Investment Conference- May 9, 2019 (Scottsdale AZ) Invited Talk
  82. Trends and Science in Immuno-Oncology-Andrew Kummel


    83. Raytheon Corporation Invited Seminar , June 11, 2019 (Tustin, Az)-Invited Talk
  83. Atomic Layer Deposition for Next Generation Semiconductor Electronics -Andrew Kummel, Steven Wolf, Mike Breeden, Ashay Anurag, Jong Choi, Chris Ahles, Scott Ueda, Aaron Mcleod


    84. INFOS Conferences July 1-3, 2019 (Cambridge UK) 2 contributed talks + 1 poster
  84. Selective Atomic Layer Deposition of TiO2, (talk)C. Ahles, J. Choi, K. Wong, S. Nemani and A. Kummel, UC San Diego, USA and Applied Materials

  85. Low Defect Interfaces on SiGe by Imperfect ALD. (talk) M. S. Kavrik, E. Chagarov, and A. Kummel, UC San Diego,

  86. Surface Free Energy and Interface Strain in HfO2 and HfZrO2 Ferroelectric Formation-A C. Kummel, E. Chagarov, M. Kavrik, M.B. Katz, N. A. Sanford, A. Davydov2 M. H. Lee UC San Diego, CA, USA; NTNU, Taipei, Taiwan,


    87. AMSL Corporation July 25th, 2019 (San Diego, CA) Invited Seminar
  87. ALD for Corrosion Inhibition-Andrew Kummel


    88. HK Hynix Corporation July 31, 2019 (Seoul, South Korea) Invited Seminar<
  88. Novel ALD of Metals, Silicides, Barriers, and Heat Spreaders -Andrew Kummel


    89. Samsung Corporation Aug 2, 2019 (Seoul, South Korea) Invited Seminar
  89. Novel ALD of Metals, Silicides, Barriers, and Heat-Andrew Kummel


    90. Global Foundries Sept 23, 2019 (Albany NY) Invited Seminar
  90. DFTMD of Amorphous Oxide-GaN Interfaces Evgueni Chagarov and Andrew Kummel


    91. International Electron Device Meeting (IEMD) Dec 7-9 2019 (San Francisco) 1 contributed talk
  91. A Novel Ferroelectric Superlattice Based Multi-Level Cell Non-Volatile Memory K. Ni, J. Smith, A. C. Kummel, and S. Datta,


    92. Semiconductor Interface Specialist Conference, SISC, Dec 11-14 2019 (San Diego) 2 contributed talks, 5 posters
  92. Selectivity Comparison of Co & Ru Metal ALD on Cu, Pt, and SiO2, (talk) M. Breeden, S. Wolf, J. Choi, S. Ueda, and A. C. Kummel, UCSD

  93. Atomic and Electronic structure of Quantum Dot Super Lattice, (poster)M. S. Kavrik , W. Ko , J. A. Hachtel , C. Qian , A. Abelson , H. Kashyap, A. Li, J. Idrobo, M. Law , and A. C. Kummel, UCSD, Oak Ridge National Laboratory, UC Irvine

  94. Processes for Low Temperature Crystalline Aluminum Nitride Atomic Layer Deposition (poster) A. McLeod, S. T. Ueda, V. Wang, and A. C. Kummel, UCSD

  95. Selective Water-Free Deposition of TiO2, C. Ahles , J. Choi , Y. Cho , K. Wong, S. Nemani, and A. C. Kummel, UCSD, Applied Materials

  96. Vapor Phase Passivation for Selective ALD and CVD of Metals, Metal Oxides, and Metal Silicides (poster), A. Anurag, M. Breeden, Y. Cho, C. Ahles, J. Choi, and A. C. Kummel, UCSD

  97. Formation of Electronically And Chemically Passive Termination on PbSe Quantum Dot Superlattices (poster), S. T. Ueda, I. Kwak, A. Abelson, S. Wolf, C. Qian, M. Law, and A. C. Kummel, UCSD, UC Irvine

  98. DFT models of ferroelectric-paraelectric and ferroelectric-antiferroelectric boundaries in hafnium-zirconium oxides (talk), K. Chae, K. Cho, and A. C. Kummel, UCSD, UT Dallas


    99. 2020 IEEE Symposium on VLSI Technology Jun 16-19, 2020 (Honolulu, HI, USA, virtual) 1 talk
  99. Atomic-Scale Imaging of Polarization Switching in an (Anti-)Ferroelectric Memory Material: Zirconia (ZrO2) (talk) S Lombardo, C Nelson, K Chae, S Reyes-Lillo, M Tian, N Tasneem, Z Wang, M Hoffmann, D Triyoso, S Consiglio, K Tapily, R Clark, G Leusink, K Cho, A Kummel, J Kacher, A Khan


    100. Materials Research Society Annual Meeting April 13-17 2020 (Phoenix Az converted to virtual) (1 invited and 1 contributed talk)
  100. Nanoscale Proximity Effects in Selective Metal ALD (invited) Andrew Kummel, Michael Breeden, Steven Wolf, Ashay Anurag, Victor Wang

  101. DFT Models of Negative Capacitance in Hafnium/Zirconium Oxide Polymorphs Kisung Chae, Kyeongjae Cho, Andrew Kummel


    102. Very Large Scale Integration Conference VLSI-TSA April 27-29 2020 (Hsinchu, Taiwan converted to virtual) (2 contributed talks and 1 poster)
  102. Proximity Effect of Selective Co ALD on the Nanoscale, (poster) Michael Breeden, Steven Wolf, Ashay Anurag,Victor Wang, Andrew C. Kummel University of California, San Diego

  103. DFT Models of Negative Capacitance, (talk) Kisung Chae, Kyeongjae Cho, Andrew Kummel UCSD UTD

  104. Deposition of High Thermal Conductivity AlN Heat Spreader Films (talk) Scott T. Ueda, Aaron McLeod1, Michelle Chen, Chris Perez, Eric Pop, Dan Alvarez, Andrew C. Kummel UCSD, Stanford, and Rasirc


    105. Atomic Layer Deposition Conference (ALD-2020AVS) June 28 to July 1 2020 (Ghent Belgium converted to Virtual) 1 invited talk
  105. Deposition of High Thermal Conductivity AlN Heat Spreader Films Andrew Kummel (University of California, San Diego, USA),


    106. ECS PRiME Conference Oct 4-9, 2020 (Virtual) 1 poster
  106. Deposition of Large-Grain Polycrystalline Aluminum Nitride at Low Temperature via Bias-Enhanced Atomic Layer Annealing Aaron J. McLeod, Scott T. Ueda, Andrew C. Kummel (Virtual conference)


    107. IEEE International Interconnect Technology Conference (IITC) Oct 5-8, 2020 (Ghent Belgium converted to Virtual) 1 contributed talk
  107. Proximity Effect of Selective Co ALD on the Nanoscale M. Breeden S Wolf, A. Anurag, V. Wang, D. Moser, R. Kanjolia, M. Moinpour, J. Woodruff, A. C. Kummel


    108. International Electron Device Meeting (IEDM) Dec 13-15 2020 (San Francisco converted to virtual) 1 contributed talk
  108. Sub-0.5 nm Interfacial Dielectric Enables Superior Electrostatics: 65 mV/dec Top-Gated Carbon Nanotube FETs at 15 nm Gate Length, G. Pitner; Z. Zhang; Q. Lin; S.-K Su; C. Gilardi; C. Kuo; H. Kashyap; T. Weiss; Z. Yu; T. -A. Chao; L.-J. Li; S, Mitra, H.-S. P. Wong, J. Cai, A. Kummel, P. Bandaru, M. Passlack


    109. Semiconductor Interface Specialist Conference, SISC, Dec 7-10 2020 (San Diego, CA converted to virtual). 3 contributed talks and 5 posters
  109. DFT models on interfaces of ferroelectric and antiferroelectric hafnium¬ zirconium oxides to dielectric oxides and semiconductor, (talk) K. Chae, A. C. Kummel, and K. J. Cho, UCSD, UT Dallas

  110. Precursor Comparison for Selective Low Resitivity Selective Ru Atomic Layer Deposition, (poster) V. Wang, M. Breeden, and A. C. Kummel, UCSD

  111. Selective Pulsed Chemical Vapor Deposition of TiO2/Al2O3 Nanolaminates on Si and SiO2 in Preference to SiCOH, (poster) J. Huang, Y. Cho, and A. C. Kummel UCSD

  112. Bias ¬Enhanced Atomic Layer Annealing for the Deposition of High ¬Quality Aluminum Nitride Thin Films On Silicon, (poster) A. J. McLeod, S. T. Ueda, and A. C. Kummel, UCSD

  113. Deposition Mechanism of Sub 1nm EOT Bilayer Gate Oxides on Inert Carbon Surfaces Via Lateral growth of Al2O3 Nucleation Layers, (talk) Z. Zhang, C. Kuo, J. Spiegelman, H. Kashyap, G. Pitner, M. Passlack, Q. Lin, H.¬S. P. Wong, A. C. Kummel, and P. Bandaru, UCSD, TSMC, Stanford U.

  114. Selective Pulsed CVD of HfO2/TiO2 Nanolaminate for Nanoscale Patterning, (talk) Y. Cho, J. Huang, C. Ahles, and A. C. Kummel, UCSD

  115. Ferroelectric HZO capacitor with W/TiN bottom electrode with no wakeup, (poster) H. Kashyap, M. S. Kavrik, C. Kuo, T. Weiss, A. Yadav, and A. C. Kummel, UCSD, Applied Materials

  116. Low Resistivity Titanium Nitride Thin Film Fabricated by Atomic Layer Deposition on Silicon, (poster) C. Kuo, V. Wang, Z. Chang, H. Kashyap, D. Alvarez, and A. C. Kummel, UCSD, RASIRC


    117. GOMACTech 2021 March 19-21 2021 (San Diego, CA converted to virtual)
  117. Bias-Enhanced Atomic Layer Annealing for the Deposition of High-Quality Aluminum Nitride Thin Films on Silicon (poster) A. McLeod, S. Ueda, A. Kummel


    118. Materials Research Society (MRS) National Meeting April 18-21 2021 (Arizona, AZ converted to virtual) 3 contributed talks
  118. In Situ Transmission Electron Microscopy of Field-Induced Polarization Switching in Antiferroelectric Zirconia (talk) Sarah Lombardo, Christopher Nelson, Kisung Chae, Sebastian E. Reyes-Lillo, Mengkun Tian, Nujhat Tasneem, Zheng Wang, Michael Hoffmann, Kyeongjae Cho, Andrew Kummel, Josh Kacher and Asif Khan

  119. Ferroelectric HZO Capacitor with W/TiN Bottom Electrode with No Wakeup (talk) Harshil Kashyap, Mahmut S. Kavrik, Chenghsuan Kuo, Ajay Yadav and Andrew Kummel; University of California, San Diego, United States; Applied Materials, Inc., United States

  120. DFT Modeling of Scaling Limits in FEFETs Kisung Chae, Andrew Kummel and Kyeongjae Cho University of California, San Diego, United States; The University of Texas at Dallas, United States


    121. Very Large Scale Integration Conference VLSI-TSA April 19-21 2021 (Hsinchu, Taiwan + hybrid) 1 invited talk + 2 contributed talks
  121. Back End of Line (BOEL) Processing and Cross Over to Packaging (invited short course) Andrew Kummel, University of California, San Diego

  122. Grain Structure-Resistivity Relationship of Ru ALD Precursor Michael Breeden, Victor Wang, Francis Yu, and Andrew C. Kummel University of California, San Diego

  123. DFT Models of Ferroelectric Hafnium-Zirconium Oxide Stacks With and Without Dielectric Interlayer Kisung Chae, Andrew Kummel, Kyeongjae Cho UCSD and UT Dallas


    124. ALD/ALE 2021 June 27-30 (Virtual) 1 contributed talk
  124. Inherent Selective CVD of amorphous HfO2/TiO2 Nanolaminate for Nanoscale Patterning Y. Cho, J. Huang, C. Ahles, K. Wong, S. D. Nemani, E. Yieh, A. C. Kummel UCSD and Applied Materials


    125. International Interconnect Conference (IITC) July 6-9 2021 (Kyoto, Japan converted to virtual) 2 contributed talks
  125. Characterization of Low-Temperature Selective Cobalt Atomic Layer Deposition (ALD) for Chip Bonding M.-J. Liu, M. Breeden, V. Wang, N. N. J. Lin, C. H. Winter, A. Kummel, M. Bakir UCSD, Wayne State, Georgia Tech

  126. Low Resistivity Titanium Nitride Thin Film Fabricated by Atomic Layer Deposition on Silicon," C.-H. Kuo; V. Wang; Z. Zhang; J. Spiegelman; D. Alvarez; A. C. Kummel, S. Yun, H. Simka UCSD, Rasirc, Samsung


    127. 240th Meeting of The Electrochemical Society (ECS) Oct 10-14 2021 (Orlando, Florida converted to Virtual) 1 invited talk
  127. Deposition of Crystalline AlN on Si and SiC Using Atomic Layer Annealing and Pulsed ALD/CVD A. C. Kummel, S. Ueda, A. McLeod, D. Alvarez, J. Spiegelman, J. Woodruff, M. Moinpour, and R. Kanjolia UCSD, EMD Electronics, Rasirc


    128. American Vacuum Society National Meeting AVS Oct 25-Oct, 2021 (Tampa, F converted to virtual) -1 contributed talks
  128. Deposition of Large-Grained Polycrystalline Aluminum Nitride at Low Temperature via Bias-Enhanced Atomic Layer Annealing, Aaron McLeod, S. Ueda, A. Kummel, UC San Diego


    129. International Electron Devices Meeting (IEDM) Dec 1-5, 2021 (San Francisco, CA) 1 contributed talk
  129. Short-Channel Double-Gate FETs with Atomically Precise Graphene Nanoribbons” Z. Mutlu, Y. Lin, G. B. Barin, Z. Zhang, G. Pitner, S. Wang, R. Darawish, M. Di Giovannantonio, H. Wang, J.Cai, M. Passlack, C. H. Diaz, A. Narita, K. Müllen, F. R. Fischer, P. Bandaru, A. C. Kummel, P. Ruffieux, R. Fasel, and J. Bokor UCSD, UC Berkley TSMC, Stanford


    130. Semiconductor Interface Specialist Conference, SISC, Dec 7-10 2021 (San Diego, CA) 1 invited talk, 1 contributed talk + 6 posters
  130. Isovalent doping in hafnium¬zirconium oxides to lower polarization switching voltage (talk) K. Chae , A. C. Kummel, and K. Cho, UCSD and UT Dallas

  131. Selectivity Relationship of Ru ALD towards Bulk¬like Resistivity (poster), M. Breeden, V. Wang, F. Yu, R. Kanjolia, M. Moinpour J. Woodruff, H. Simka, and A. C. Kummel, UCSD,2EMD Electronics, Samsung Electronics

  132. Crystalline Gallium Nitride Deposition by RF ¬Biased Atomic Layer Annealing (poster), A. J. McLeod, S. T. Ueda, J. Spiegelman and A. C. Kummel, UCSD, RASIRC

  133. RF ¬Biased Atomic Layer Annealing of Polycrystalline Materials at Low Temperature on Insulators (invited talk), A. J. McLeod, S. T. Ueda, J. Spiegelman, and A. C. Kummel, UCSD, RASIRC

  134. Plasma Enhanced Atomic Layer Deposition of Crystallized Gallium Phosphide with Triethylgallium and Tritertbutylphosphine (poster), S. Yun, S. T. Ueda, V. Wang, C.¬H. Kuo, H. Kashyap, A. J. McLeod, and A. C. Kummel, UCSD

  135. Low Resistivity Titanium Nitride Thin Film Fabricated by Atomic Layer Deposition in Patterned Samples,(poster) C.¬H. Kuo, A. J. McLeod, J. Huang, V. Wang, Z. Chang, D. Alvarez, and A. C. Kummel UCSD, RASIRC

  136. Selective Chemical Vapor Deposition of TiO2/Al2O3 and HfO2/Al2O3 Nanolaminates on Si and SiO2 in Preference to SiCOH,(poster) J. Huang, Y. Cho, Z. Zhang, K. T. Wong, S. D. Nemani, E. Yieh, and A. C. Kummel UCSD, Applied Materials

  137. Interlayer thinning by Oxygen scavenging Electrode in HZO/Ge interface (poster), H. Kashyap and A. C. Kummel, UCSD

    138. Very Large Scale Integration Conference VLSI-TSA April 18-21 2022 (Hsinchu, Taiwan + hybrid) 1 poster
  138. Tetravalent doping in hafnium-zirconium oxides to lower polarization switching voltage (poster) Kisung Chae, Andrew C Kummel and Kyeongjae Cho


    139. Areas Selective Deposition Conference 2022 April 21-22 2022 (San Francisco, CA) 1 invited talk + 1 contributer tak + 4 posters
  139. Studies Toward Highly Selective Cobalt Metal ALD on Copper Features for Heterogeneous Chiplet Integration (talk) Z.J. Devereaux, M. Manle, M.J. Li, N.M.K. Linn, M.S. Bakir, A. Kummel, C.H. Winter UCSD, Wayne State, Georgia Tech

  140. Minimization of Hydrogen Plasma Damage J.J. Spiegelman, D. Alvarez, J.Z. Spiegelman, Y. Cho, J. Wang, A.C. Kummel UCSD, Rasirc

  141. Role of Dose Optimization in Ru ALD for Low Resistivity Films (poster) V. Wang, M. Breeden, N. Ashburn, M. Bergschneider, J. Speigelman H. Simka, K. Cho, A. Kummel USD, Rasirc, UT Dallas

  142. Selective Water-Free Chemical Vapor Deposition of HfO2/TiO2 nanolaminate for nanoscale patterning (poster) Y. Cho, H. Huang, C. Ahles, K. Wong, S.D. Nemani, E. Yieh, A. Kummel UCSD, Applied Materials

  143. Pulsed CVD of TiO2/Al2O3 and HfO2/Al2O3 Nanolaminates on Si and SiO2 in Preference to SiCOH (invited) A. Kummel


    144. Materials Research Society (MRS) April 2-5 2022 (Hawaii) 1 invited talk + 2 poster contributed talks
  144. Extreme Density Fused Al2O3 Microdiamond-TMPTA Composites for Interposer and Advanced Packaging for RF/mmWave Applications (poster) Chelsea Swank, Michelle Chen, Woojae Lee, Andrew Kummel and Eric Pop UCSD, Stanford

  145. Reduced Polarization Switching Energy Barrier in Tetravalent-Doped HfO2, (poster) Kisung Chae, Andrew Kummel, Kyeongjae Cho

  146. Control of Interfacial Gain Structure for Deposition of III-V Nitrides with RF Bias Atomic Layer Annealing (invited) Aaron J. McLeod, Scott T. Ueda, Jeff Spiegelman, and Andrew C. Kummel UCSD and Rasirc

  147. Thermal and electrical Properties of Wide Bandgap Nitride thin films Deposited at Low Temperatures for Heterogenous Integration (contributed) M. Chen, C. Perez, V. Chen, Z. Sobell, C. Koroglu, I. Khan, S. Ueda, A. McLeod, E. Pop, K. Goodson, S. George, A. Kummel


    148. International Interconnect Conference (IITC) June 28-30 2022 (San Jose, CA) 1 invited talk, 1 poster
  148. ALD of Ru with bulk-like resistivity by balancing precursor concentration to maximum surface mobility and minimize contaminants (invited) Andrew Kummel

  149. Low Resistivity Titanium Nitride Thin Film Fabricated by Atomic Layer Deposition with TiCl4 and Metal-Organic Precursors in Horizontal Vias (poster) Cheng Hsuan Kuo, Andrew Kummel UCSD