PATENTS

1. Dipayan Pal, Naeun Yang, Andrew C. Kummel, Harsono Simka, Jacob Watson "Rapid process for vapor-deposited ZIF-8 metal organic framework (MOF) for low-k dielectric seamless high aspect ratio gap fill" US KR US20250257465A1 UCSD and Samsung Electronics Co., Ltd. Priority 2024-02-09 * Filed 2025-02-07 * Published 2025-08-14


2. Mike Breeden, Victor Wang, Andrew Kummel, Ming-Jui Li, Muhannad Bakir, Jonathan Hollin, Nyi Myat Khine Linn, Charles H. Winter "Methods of forming stacked integrated circuits using selective thermal atomic layer deposition on conductive contacts and structures formed using the same" US US20240347502A1 UCSD, Georgia Tech, Wayne State University Priority 2020-09-09 * Filed 2024-06-26 * Published 2024-10-17


3. Keith Tatseun Wong, D Nemani Srinivas, Andrew C Kummel, Yunil Cho , Huang James "Selective "Deposition of Metal Oxides by Pulsed Chemical Vapor Deposition:"vvWO US CN JP KR TW JP2024119793 UCSD, Applied Materials Priority 2020-04-08 * Filed 2024-04-30 * Published 2024-09-03


4. Jian Yang, Alexander Liberman, James Wang, Christopher Barback, Natalie Mendez, Erin Ward, Sarah Blair, Andrew C. Kummel, Tsai-Wen Sung, William C. Trogler, WO US US20240081941A1 UCSD Priority 2016-08-31 * Filed 2023-11-13 * Published 2024-03-14


5. Keith T. Wong, Srinivas D. Nemani, Ellie Y. Yieh, Andrew C. Kummel, Yunil Cho, James Huang "Dielectric-on-dielectric selective deposition using aniline passivation" WO EP US CN KR TW EP4599108A1 UCSD Applied Materials, Inc. Priority 2022-10-06 * Filed 2023-10-03 * Published 2025-08-13


6. Christopher Larson,Bryan T. Oronsky, Tony R. Reid, Tao Dong, Ching-Hsin Huang, Andrew C. Kummel, Abraham T. Phung, Jaimin R. Shaw, William C. Trogler "Adenoviral vectors encapsulated in cationic liposomes, and preparation and use thereof"EP4554559A1 UCSD EpicentRx, Inc. Priority 2022-07-13 * Filed 2023-07-12 * Published 2025-05-21


7. Aaron McLeod, Scott Ueda, Andrew Kummel "Methods of depositing aluminum nitride templating layers using thermal pulsed chemical vapor deposition for the enhancement of aluminum nitride thick films and related films"US US20240052493A1 UCSD Priority 2022-05-02 * Filed 2023-05-02 * Published 2024-02-15


8. Harshil Kashyap, Andrew C. Kummel, Ajay Kumar Yadav, Keith T. Wong, Srinivas Nemani, Ellie Yieh "Ultra high-k hafnium oxide and hafnium zirconium oxide films" US US20240301552A1 UCSD, Applied Materials, Inc. Priority 2023-03-09 * Filed 2023-03-09 * Published 2024-09-12


9. Andrew Kummel, Cheng-Hsuan Kuo, SeongUk Yun, Ravindra Kanjolia, Mansour Moinpour, Daniel Moser "Methods of forming low resistivity titanium nitride thin film in horizontal vias and related devices" US US12180583B2 Andrew Kummel UCSD, EMD Priority 2021-12-06 * Filed 2022-12-06 * Granted 2024-12-31 * Published 2024-12-31


10. Andrew Kummel, Michael Breeden, Victor Wang, Ravindra Kanjolia, Mansour Moinpour, Harsono Simka "Method of forming low-resistivity Ru ALD through a bilayer process and related structures" US US20230175133A1 UCSD, EMD, Samsung Electronics Priority 2021-12-06 * Filed 2022-12-06 * Published 2023-06-08


11. Michael Breeden, Victor Wang, Andrew Kummel "Methods of Performing Selective Low Resistivity Ru Atomic Layer Deposition and Interconnect Formed Using the Same" US US20220189763A1 UCSD Priority 2020-12-10 * Filed 2021-12-08 * Published 2022-06-16


12. Iljo Kwak, Kasra Sardashti, Andrew Kummel, "Semiconductor structure with nanofog oxide adhered to inert or weakly reactive surfaces" US US20220319830A1 UCSD Priority 2016-12-05 * Filed 2021-08-09 * Published 2022-10-06


13. Scott Ueda, Aaron McLeod, Andrew Kummel, Mike Burkland, Eduardo M. Chumbes, Thomas E. Kazior, Eric Pop, Michelle Chen, Chris Perez, Mark Rodwell "Low-Temperature Deposition of High-Quality Aluminum Nitride Films for Heat Spreading Applications" US US20210249331A1 UCSD, UCSB, Stanford, Raytheon Priority 2020-02-07 * Filed 2021-02-08 * Published 2021-08-12


14. Kai Ni, Suman Datta, Andrew Kummel, "Non-volatile multi-level cell memory using a ferroelectric superlattice and related systems" US US11532355B2 UCSD, Notre Dame University Priority 2019-09-26 * Filed 2020-09-25 * Granted 2022-12-20 * Published 2022-12-20


15. Ching-Hsin Huang, Natalie Mendez, James WangTomoko Hayashi, Joi Weeks, Oscar Hernandez Echeagaray, Andrew Kummel, William C. Trogler, Natalie A. Gude "Conjugation of tlr7 agonist to nano-materials enhances the agonistic activity" US US20210038742A1 UCSD Priority 2019-06-20 * Filed 2020-06-19 * Published 2021-02-11


16. Mike Breeden, Victor Wang, Andrew Kummel, Ming-Jui Li, Muhannad Bakir, Jonathan Hollin, , Nyi Myat Khine Linn, Charles H. Winter "Methods of forming stacked integrated circuits using selective thermal atomic layer deposition on conductive contacts and structures formed using the same" US20220077104A1 (2021 patent filed, 2022-03-10 published)


17. Ching-Hsin Huang, Natalie Mendez, James Wang, Tomoko Hayashi, Joi Weeks Oscar Hernandez Echeagaray, Andrew Kummel William C. Trogler, Natalie A. Gude "Conjugation of tlr7 agonist to nano-materials enhances the agonistic activity" US20210038742A1 (2020 patent filed, 2021-02-11 published; )


18. Steven Wolf, Michael Breeden, Ashay Anurag, Andrew Kummel, "Passivation of Silicon Dioxide Defects for Atomic Layer Deposition" US20200340112A1 (2020 patent filed, 2020-10-29 published)


19. Jong Choi, Christopher Ahles, Andrew C. Kummel, Keith Tatseun Wong, Srinivas D. Nemani" "High selectivity atomic layer deposition process" US20200283898A1 (2020 patent filed, 2020-09-24 published)


20. Jong Choi, Christopher Ahles, Andrew C. Kummel, Keith Tatseun Wong, Srinivas D. Nemani" "High selectivity atomic layer deposition process" US20200303183A1 (2020 patent filed, 2020-09-24 published)


21. Ravindra Kanjolia, Mansour Moinpour, Jacob Woodruff, Steven Wolf, Michael Breeden, Scott T. Ueda, Andrew Kummel, Ashay Anurag "Method for deposition of highly selective metal films" US20210398848A1+ WO2020117725A3 + 5 other countries (2019 patent filed, 2020-07-30 published)


22. Raymond Hung, Namsung Kim, Srinivas D. Nemani, Ellie Y. Yieh, Jong Choi, Christopher, Ahles, Andrew Kummel "Selective deposition of metal silicides and selective oxide removal" WO2020101806A1 + 5 other countries (2019 patent filed, 2020-05-22 published)


23. Andrew Kummel, Steven Wolf, Michael Breeden, Scot T. Ueda, Aaron McLeod, Lukas Mayr, Alexander Georg Hufnage, Daniel Dr. Loeffler, Hagen Dr. Wilmer "Process for the generation of aluminum-containing films" EP3795714A1 (2019 patent filed, 2021-03-24 published, 2021 withdrawn)


24. Thomas J. Kipps, Bradley T. Messmer, Ana B. Sanchez, Andrew C. Kummel, Manuel Ruidiaz "Methods for detecting antibodies" US20190324044A1 US10921329B2 (2019 patent filed, 2019-10-24 published, 2021-02-16 issued)


25. Yogita Pareek, Kevin A. Papke. Emily Sierra Thomson, Mahmut Sami Kavrik, Andrew C. Kummel "Coating for halide plasma resistance" US20200354833A1 and US11118263B2 (2019 patent filed, 2021 2020-11-12 published, 2021-09-14 issues)


26. Raymond Hung, Namsung Kim, Srinivas D. Nemani, Ellie Y. Yieh, Jong Choi, Christopher Ahles, Andrew Kummel "Selective deposition of metal silicides" US20190103278A1, US10586707B2 and WO2018218078A1 (2018 patent files, 2020-03-10 published, 2020-03-10 issued)


27. Iljo Kwak, Kasra Sardashti, Andrew Kummel "High-k gate dielectrics on 2d substrates, inert surfaces, and 3d materials" US20180158670A1 and US11127590B2 (2017 patent filed, published 2018-06-07, 2021-09-21 issued)


28. Andrew C. Kummel, Mary Edmonds, Mei Chang, Jessica S. Kachian "CVD silicon monolayer formation method and gate oxide ALD formation on semiconductor materials" US10373824B2 and US20180033610A1 (2017 patent filed, 2018-02-01 published, 2019-08-06 issued)


29. Jessica S. Kachian, Naomi Yoshida, Mei Chang, Mary Edmonds, Andrew C. Kummel, Sang Wook Park, Hyunwoong Kim "Self-limiting and saturating chemical vapor deposition of a silicon bilayer and ALD" US20180019116A1 (2017 patent filed, 2018-01-18 published, 2020-02-04 issued)


30. William C. Trogler, Andrew C. Kummel, Zhe Wu, Sarah Blair, Robert F. Mattrey, Alexander Liberman, Casey N. Ta "Degradable silica nanoshells for ultrasonic imaging/therapy US20180099050A1 and AU2013323203B2 and many other countries(2017 patent filed, 2015-04-09 2019 published, 2017-04-13 issued in Australia but abandoned USA)


31. Tobin Kaufman-Osborn, Andrew C. Kummel, Kiarash Kiantaj "Method for cleaning, passivation and functionalization of Si—Ge semiconductor surfaces" US10483097B2 and US20180138030A1 (2017 patent filed, 2018-05-17 published, 2019-11-19 issued)


32. Jian Yang, Alexander Liberman, James Wang, Christopher Barback, Natalie Mendez, Erin Ward, Sarah Blair, Andrew C. Kummel, Tsai-wen Sung, William C. Trogler "Ultrasound responsive micro-composite markers" WO2018045222A1 AND US20190192253A1 (2017 patent filed, 2019-06-27 published)


33. Zi-Wei Fang, Hong-Fa Luan, Wilman Tsai, Kasra Sardashti, Maximillian Clemons, Scott Ueda, Mahmut Kavrik, Iljo Kwak, Andrew Kummel, Hsiang-Pi Chang "Nanolaminate structure, semiconductor device and method of forming nanolaminate structure" US20180122916A1 and US10840350B2 (2017 patent filed, 2018-05-03 publication, 2020-11-17 issued)


34. Steven Wolf, Mary Edmonds, Andrew C. Kummel, Srinivas D. Nemani, Ellie Y. Yieh "Low-temperature atomic layer deposition of boron nitride and BN structures" US10297441B2 and US20180040476A1 (2017 patent filed, 2018-02-08 published, 2019-05-21 issued )


35. Naomi Yoshida, Lin Dong, Andrew Kummel, Jessica Kachian, Mary Edmonds, Steve Wolf "Surface functionalization and passivation with a control layer" US20170309479A1 and US10262858B2 (2017 patent filed, 2017-10-26, published, 2019-04-16)


36. Jian Yang,James Wang, Christopher Barback, Erin Ward, Natalie Mendez, Sarah Blair, Andrew C. Kummel, William C. Trogler, Tsai W. Sung "Fluorescent and/or NIR coatings for medical objects, object recovery systems and methods" WO2017151634A1 and US11338069B2 and US20190381218A1 (2017 patent filmed, 2019-12-19 published, 2022-05-24 issued)


37. Lin Pang, Yeshaiahu Fainman, Andrew C. Kummel, Brandon Hong "Optical phase modulation systems and methods" US10330595B2 (2016 patent filled, 2018-10-04 published, 2019-06-25 patent granted)


38. Jessica S. Kachian, Naomi Yoshida, Mei Chang, Andrew C. Kummel, Mary Edmonds "Low temperature ALD on semiconductor and metallic surfaces" US20170040158A1 (2016 patent filed, 2017-02-09l, published 2019 abandoned)


39. Andrew C. Kummel, Alexander Liberman, Robert Viveros, William C. Trogler "Silica nanostructures, large-scale fabrication methods, and applications thereof" WO2016149711A1 (2015 patent filed, 2016-09-22 published)


40. Mary Edmonds, Andrew C. Kummel, Atif M. Noori "Self-limiting chemical vapor deposition and atomic layer deposition methods" US9607920B2 (2016 patent filed, 2016-06-30 published, 2017-03-28 patent granted)